SEMI C6.3 PARTICLE SPECIFICATION FOR GRADE 20/0.2 HYDROGEN (H2) DELIVERED AS PIPELINE GAS
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SEMI C6.3 Document Information:
Title
PARTICLE SPECIFICATION FOR GRADE 20/0.2 HYDROGEN (H2) DELIVERED AS PIPELINE GAS
Semiconductor Equipment and Materials International
Publication Date:
Jan 1, 1989
Scope:
This document applies only to hydrogen gas delivered through
pipelines; it is not applicable to cylinder gases or gases in their
liquid state.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
The purposes of this document are (1) to set a maximum
permissible particle concentration for Grade 20/0.2 hydrogen gas
and (2) to describe a reference method for its verification.
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