SEMI F67 TEST METHOD FOR DETERMINING INERT GAS PURIFIER CAPACITY
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SEMI F67 Document Information:
Title
TEST METHOD FOR DETERMINING INERT GAS PURIFIER CAPACITY
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2001
Scope:
To determine the impurity capacity of a gas purifier at the
point of breakthrough. Capacity tests are done by adding ppm levels
of a given gaseous impurity to a pure zero gas and monitoring the
effluent of the test purifier for active impurity species.
NOTE 1: Mixtures of two or more impurities for multi-impurity
removal purifiers are a more representative method for determining
capacity.
This document is intended for point of use (POU) inert gas
purifiers where inlet purity is 99.9995% or higher.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
The purpose of this document is to define a test method to
quantify impurity removal capacity of inert gas purifiers.
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