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Document SEMI S6 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.
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SEMI S6 Document Information:
Title
EHS GUIDELINE FOR EXHAUST VENTILATION OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
Semiconductor Equipment and Materials International
Publication Date:
Jul 1, 2007
Scope:
This guideline applies to semiconductor manufacturing equipment
that incorporates exhaust ventilation intended to be connected to
user facilities' exhaust ventilation system(s).
The criteria of this document should be applied to exhaust
ventilation systems provided for the purposes (in whole or in part)
of personnel protection, equipment protection, and fire risk
reduction.
The performance and assessment criteria in this document apply
to all of the equipment provided by a supplier to a user or to
another supplier to be provided as part of equipment the latter
supplier provides to a user.
This document is intended to help the semiconductor equipment
supplier design equipment exhaust ventilation systems to a common
set of performance criteria as well as to provide assistance to
both users and suppliers in the understanding of exhaust
ventilation requirements for equipment systems. It is not intended
to establish design specifications.
NOTE 1: Design suggestions for several applications of exhaust
ventilation are provided as Related Information.
Test methods are provided in ยง 8 and several appendices.
This document is not intended to limit hazard evaluation methods
or control strategies (e.g., design principles) employed by
suppliers or users. Many different methods may be employed if they
provide a sufficient level of protection.
Purpose
This safety guideline provides safety performance criteria for
exhaust ventilation of semiconductor manufacturing equipment (SME)
and test methods for assessing conformance to those criteria.
The optimization of exhaust ventilation is becoming more
important as energy efficiency and the physical constraints of
exhaust ventilation utilities in user facilities become more
pronounced. Efficiently designed exhaust ventilation should be
provided to protect personnel, property, and the environment from
health and safety risks. The purpose of this safety guideline is to
provide performance and design principles and test methods and
criteria for exhaust ventilation.
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