SEMI C49 SPECIFICATIONS AND GUIDELINES FOR TRIMETHYLBORATE

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SEMI C49 Document Information:

Title
SPECIFICATIONS AND GUIDELINES FOR TRIMETHYLBORATE

Semiconductor Equipment and Materials International

Publication Date:
Nov 1, 2005

Scope:

The scope of this document covers all grades of trimethylborate used in the semiconductor industry.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purpose of this document is to standardize requirements for trimethylborate used in the semiconductor industry and testing procedures to support those standards. This document also provides guidelines for grades of trimethylborate for which an industry need has been identified. In the case of guidelines, the test methods may not have been developed or may not have been statistically validated at this time.

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