SEMI F22 GUIDE FOR GAS DISTRIBUTION SYSTEMS
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SEMI F22 Document Information:
Title
GUIDE FOR GAS DISTRIBUTION SYSTEMS
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2002
Scope:
Outlined in this document are both bulk and specialty gas
distribution systems.
Components and subcomponents are identified from the
point-of-supply to the point-of-connection to the process tool.
This standard does not purport to address safety issues, if any,
associated with its use. It is the responsibility of the users of
this standard to establish appropriate safety health practices and
determine the applicability or regulatory limitations prior to
use
Purpose
This reference document is intended to outline for the user the
common systems configurations, components, and subcomponents of
high purity gas distribution systems in a semiconductor fabrication
facility. Related specifications are also noted.
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