SEMI E17 GUIDELINE FOR MASS FLOW CONTROLLER TRANSIENT CHARACTERISTICS TESTS
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SEMI E17 Document Information:
Title
GUIDELINE FOR MASS FLOW CONTROLLER TRANSIENT CHARACTERISTICS TESTS
Semiconductor Equipment and Materials International
Publication Date:
Jun 1, 2000
Scope:
This guideline is intended to establish a common basis for
communication between users and suppliers of semiconductor
equipment. It provides terminology and methodology aimed at
eliminating confusion regarding what previously has been referred
to as MFC "response time." The conditions and procedures are given
for determining and expressing the transient characteristics of a
mass flow controller (MFC) to a step change in set point. This
guideline applies to mass flow controllers for gases used in
semiconductor fabrication equipment.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
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