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SEMI F8 Document Information:
Title
TEST METHOD FOR EVALUATING THE SEALING CAPABILITIES OF TUBE FITTING CONNECTIONS MADE OF FLUOROCARBON MATERIALS, WHEN SUBJECTED TO TENSILE FORCES
Semiconductor Equipment and Materials International
Publication Date:
Sep 1, 1998
Scope:
This method can be used to characterize tube fitting connections
on the basis of test data developed under the conditions described
herein, but the results are not intended to imply a performance
rating.
Tube defined in this method ha s a circular cross section and is
made of fluorocarbon materials.
All parts of the tube fittings te sted by this method in contact
with the internal fluid are made of fluorocarbon materials.
Parts such as a nut or gripper a re not limited to being made of
a fluorocarbon material.
Only the seal between the tube and tube fitting being evaluated
is within the scope of this document. All other, threaded seals are
beyond the scope of this document.
When using this method for making comparisons between various
tube fittings and/or manufacturers, the user must be specific in
the selection of the tube and tube fittings to be evaluated.
The International System of Units (SI) is used as the standard
unit of measure in this document. The U.S. Customary units are in
parentheses for reference purposes only and have been rounded to
the nearest whole value.
Purpose
This method provides a uniform procedure to determine the
sealing capabilities of tube fitting connections made of
fluorocarbon materials when the connections are subjected to
tensile forces.
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