SEMI E43 RECOMMENDED PRACTICE FOR ELECTROSTATIC MEASUREMENTS ON OBJECTS AND SURFACES

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SEMI E43 Document Information:

Title
RECOMMENDED PRACTICE FOR ELECTROSTATIC MEASUREMENTS ON OBJECTS AND SURFACES

Semiconductor Equipment and Materials International

Publication Date:
Nov 1, 2008

Scope:

The measurement methods described herein can be applied to characterize the general electrostatic charge, voltage, field level(s) and electrostatic discharge on objects and surfaces in semiconductor manufacturing environments. Acceptable equipment, calibration, and measurement techniques are described in this document. Appendices include background information on the equipment specified and calibration procedures, as well as information and advice on performing a useful general static survey.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purpose is to establish a practice for reproducible electrostatic measurements on any surface or object, consistent with the scope and limitations set forth below.

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