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SEMI E101 Document Information:
Title
GUIDE FOR EFEM FUNCTIONAL STRUCTURE MODEL
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2004
Scope:
Model Structure and Functions
This document recognizes EFEM as a component of semiconductor
manufacturing equipment. It creates an EFEM functional structure
model to clearly describe EFEM, its functional elements, and the
functions of each functional element. The functional structure
model includes the following:
1) definition of functional elements that constitute EFEM,
2) definition of functions of functional elements, and
3) hierarchical description of functional elements.
For clarity, Fixed Buffer Type EFEM and Internal Buffer Type
EFEM (see Terminology) are represented as independent functional
structure models in this document.
Preconditions for Modeling
The models are created under the following conditions:
1) Modeling should be restricted to SEMI E15.1, Option 1,
Options 2 and 3, and Option 3 types. (See SEMI E15.1, Figure 2
(Load Port Options)).
2) The model supports handling of open cassette (OC), and Front
Opening Unified Pod (FOUP) (see Terminology).
3) The model is created for the maximum structure including
options.
4) Functional elements that have interfaces with EFEM are also
included in the model.
NOTE 1: Functional elements that don't belong to EFEM, but are
important in defining interfaces among the functional elements, are
represented in this model to clarify their functional positions and
attributes in the entire equipment.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
Productivity improvement is the task with the highest priority
in semiconductor factories of the 300 mm generation, and
computer-integrated manufacturing or factory automation (CIM/FA)
technologies become more and more important to accomplish it. The
standardization of these technologies is also necessary to provide
the CIM/FA infrastructure in a short period of time at a low cost.
Since the standards will have to cover a wide range of production
equipment, communication hardware, and software tools, it is very
important that the standards have a high degree of compatibility.
In order to improve the compatibility, this guide provides a
functional structure model of an Equipment Front End Module (EFEM)
that handles carriers and substrates at the interface between the
factory material handling system and the process equipment.
The major purposes of this guide are as follows:
1) provide a common understanding of functions of EFEM
(Equipment Front End Module) and associated interfaces between
functional elements (components with particular function
roles),
2) provide a common understanding of the hierarchical structure
of functions and their interfaces in an EFEM,
3) provide a common understanding of possible units used for
maintenance, adjustment, and control, and
4) provide a map between EFEM functional elements and existing
standards.
About IHS
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