SEMI S17 SAFETY GUIDELINE FOR UNMANNED TRANSPORT VEHICLE (UTV) SYSTEMS
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SEMI S17 Document Information:
Title
SAFETY GUIDELINE FOR UNMANNED TRANSPORT VEHICLE (UTV) SYSTEMS
Semiconductor Equipment and Materials International
Publication Date:
Jul 1, 2001
Scope:
This guideline applies to UTV systems used in semiconductor
manufacturing.
This guideline addresses both floor-traveling and
space-traveling UTV systems. Floor-traveling vehicle systems
include automatic guided vehicle (AGV) systems and rail guided
vehicle (RGV) systems. Spacetraveling vehicle systems include
interbay overhead transport vehicle systems and intrabay overhead
hoist transport vehicle (OHT) systems.
Evaluations for conformance to this document should include all
equipment that is provided by the UTV system supplier including
separate items such as rails, control panels, power panels, and any
other type of equipment necessary for operation of the unmanned
transport vehicles.
This safety guideline does not purport to address all of the
safety issues associated with its use. It is the responsibility of
the users of this guideline to establish appropriate safety and
health practices and determine the applicability of regulatory
limitations prior to use.
Purpose
These guidelines are intended as a set of environmental, safety,
and health considerations for unmanned transport vehicle (UTV)
systems. UTV systems are used to automate the movement of material
within semiconductor factories. Unmanned transport vehicle systems
include both floor-traveling vehicle systems and space-traveling
vehicle systems.
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