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Document SEMI E38 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.
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SEMI E38 Document Information:
Title
CLUSTER TOOL MODULE COMMUNICATIONS (CTMC)
Semiconductor Equipment and Materials International
Publication Date:
Dec 1, 1996
Scope:
Cluster tool module communications address only communications
with and among modules within a cluster tool and not the
communications between the cluster tool and the factory. It is the
modules and their interrelations which are modeled and not the
cluster tool seen as a single equipment.
This standard does not specify cluster controller functionality
(e.g., scheduling, human machine interface, cluster tool recipe
editing, and management) but will enable development of standards
in this area. The cluster controller is included only to the extent
that it represents the entity or entities responsible for
supervisory control of the modules in a cluster tool.
This standard identifies the communications services necessary
to achieve automated control of independent transport, process, and
cassette modules in a cluster tool. It defines the essential module
architecture and the concepts and models on which the
communications services are based.
The scope includes primary control services for material
processing in process modules, material movement within the cluster
tool, and material input/output with the factory. Support services
also exist to enable recipe handling, resolution of exception
conditions, event reporting, and data access.
A reliable communications environment is required for
distributed control and is specified in supplementary
standards.
This standard specifies the application of more general service
standards as required within a cluster tool. This includes the
limitations imposed by the cluster tool architecture and the
fundamental functionality needed for compliance. The details of the
general services, protocols, and communication environment elements
are defined in the corresponding standards documents
referenced.
This version of the standard is provisional because a number of
the general services on which it relies are not yet standardized.
The sections referring to these services have been omitted until
they have become standards. These sections will be balloted
separately with the corresponding general services and incorporated
into this provisional standard.
The communication between the cluster tool as a single equipment
and the factory is beyond the scope of cluster tool module
communications standardized here and should follow the applicable
SEMI standards (GEM, MMMS).
These standards place no restriction on where, within the
cluster tool control architecture, this specific set of definitions
is implemented. However, to have complete compliance to the
standards in the area of the communications interface definitions,
the entire layered structure as outlined in this document must be
implemented.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
Cluster tools fulfill a need for modularity and flexibility in
semiconductor manufacturing equipment. This standard addresses the
communications with and among modules within a cluster tool for
automated control.
The module communications services defined here will enable
standard interoperability of modules from independent suppliers.
Together with other cluster tool standards, this is intended to
result in the emergence of standards-compliant interoperable
sub-systems. They should allow applications software to be
developed which can assume the existence of these services and
allow software products to be developed to offer them.
The adoption of the standards described will greatly reduce the
effort required to integrate cluster tool components from
independent suppliers. Compliance requires support of a minimal,
but specific, set of standard services.
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