SEMI E18 GUIDELINE FOR TEMPERATURE SPECIFICATIONS OF THE MASS FLOW CONTROLLER
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SEMI E18 Document Information:
Title
GUIDELINE FOR TEMPERATURE SPECIFICATIONS OF THE MASS FLOW CONTROLLER
Semiconductor Equipment and Materials International
Publication Date:
Jan 1, 1991
Scope:
This guideline contains definitions of terms which describe the
effects of temperature upon mass flow controllers as used in the
semiconductor industry.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
The purpose of this guideline is to establish a uniform,
worldwide means to describe the temperature parameters which are
characteristic of mass flow controllers. It is intended to prevent
confusion and misunderstanding between manufacturers and users.
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