SEMI F52 DIMENSIONAL SPECIFICATION FOR METRIC PFA TUBES FOR LIQUID CHEMICAL DISTRIBUTION IN SEMICONDUCTOR AND FLAT PANEL DISPLAY MANUFACTURING
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SEMI F52 Document Information:
Title
DIMENSIONAL SPECIFICATION FOR METRIC PFA TUBES FOR LIQUID CHEMICAL DISTRIBUTION IN SEMICONDUCTOR AND FLAT PANEL DISPLAY MANUFACTURING
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2001
Scope:
This document applies to metric tubes made from PFA.
This specification does not purport to address safety issues, if
any, associated with its use. It is the responsibility of the users
of this specification to establish appropriate safety and health
practices and determine the applicability of regulatory limitations
prior to use.
Purpose
This document defines sizes and their measurement methods of
metric PFA tubes for liquid chemical distribution in semiconductor
and flat panel display manufacturing equipment and facilities.
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