SEMI D9 TERMINOLOGY FOR FPD SUBSTRATES

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SEMI D9 Document Information:

Title
TERMINOLOGY FOR FPD SUBSTRATES

Semiconductor Equipment and Materials International

Publication Date:
Mar 1, 2003

Scope:

These terms and definitions are applicable to both front and back substrates used in FPD fabrication.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

This document provides terms and definitions of materials and defects within and on the surface of flat panel display (FPD) substrates and of dimensional, thermal, chemical, optical and mechanical properties of FPD substrates.

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