SEMI M19 SPECIFICATION FOR ELECTRICAL PROPERTIES OF BULK GALLIUM ARSENIDE SINGLE CRYSTAL SUBSTRATES

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SEMI M19 Document Information:

Title
SPECIFICATION FOR ELECTRICAL PROPERTIES OF BULK GALLIUM ARSENIDE SINGLE CRYSTAL SUBSTRATES

Semiconductor Equipment and Materials International

Publication Date:
Jan 1, 1991

Scope:

This document specifies the characteristics and ranges of electrical properties for bulk GaAs crystals and substrate wafers. For high resistivity and n-type conducting materials, the permissible growth conditions or impurity species are stated; the electrical properties corresponding to the appropriate range(s) are noted. Due to the limited understanding, experience and demand for p-type materials only guidelines are provided in this specification at the present writing.

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