SEMI E80 TEST METHOD FOR DETERMINING ATTITUDE SENSITIVITY OF MASS FLOW CONTROLLERS (MOUNTING POSITION)
 |
| Purchase Information |
| Use this form to request purchase information on SEMI online subscriptions. |
|
|
Document SEMI E80 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.
You may also purchase this document alone from the IHS Standards Store.
SEMI E80 Document Information:
Title
TEST METHOD FOR DETERMINING ATTITUDE SENSITIVITY OF MASS FLOW CONTROLLERS (MOUNTING POSITION)
Semiconductor Equipment and Materials International
Publication Date:
Feb 1, 1999
Scope:
This procedure describes a method to determine the effect of
attitude (mounting position) of a Mass Flow Controller on flow span
and zero.
The intent of this document is not to suggest any specific
testing program but to specify the test method to be used when
testing for parameters covered by this method. Reference operating
conditions represent the environmental conditions where the "best"
performance can be expected.
The minimum test described in this document is to test one MFC
in 5 common mounting positions using Nitrogen gas at 135.8 kPa
(19.7 psia) and 308 kPa (44.7 psia). This test method can be used
to evaluate additional gases, pressures or mounting attitudes.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
The purpose of this test method is to provide a standardized
method for quantifying the effect of mounting attitude on an
MFC.
This document provides a common basis for communication between
manufacturers and users regarding testing and describing MFC
mounting effects.
About IHS
IHS (NYSE: IHS) is a leading global provider of critical technical information, decision-support tools and related services in a number of industries including aerospace and defense, automotive, construction, electronics, and energy. IHS serves customers ranging from large governments and multinational corporations to smaller companies and technical professionals in more than 100 countries. IHS been in business for more than 45 years and employ more than 2,300 people around the world.
