SEMI C3.20 SPECIFICATION FOR HELIUM (He), IN CYLINDERS, 99.9995% QUALITY
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SEMI C3.20 Document Information:
Title
SPECIFICATION FOR HELIUM (He), IN CYLINDERS, 99.9995% QUALITY
Semiconductor Equipment and Materials International
Publication Date:
Mar 1, 2009
Scope:
This document covers requirements for helium used in the
semiconductor industry.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
The purpose of this document is to provide specifications for
helium (He) that is used in the semiconductor industry.
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