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SEMI E5 Document Information:
Title
SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2008
Scope:
SECS-II gives form and meaning to messages exchanged between
equipment and host using a message transfer protocol, such as
SECS-I.
SECS-II defines the method of conveying information between
equipment and host in the form of messages. These messages are
organized into categories of activities, called streams, which
contain specific messages, called functions. A request for
information and the corresponding data transmission is an example
of such an activity.
SECS-II defines the structure of messages into entities called
items and lists of items. This structure allows for a
self-describing data format to guarantee proper interpretation of
the message.
The interchange of messages is governed by a set of rules for
handling messages called the transaction protocol. The transaction
protocol places some minimum requirements on any SECS-II
implementation.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
The SEMI Equipment Communications Standard Part 2 (SECS-II)
defines the details of the interpretation of messages exchanged
between intelligent equipment and a host. This specification has
been developed in cooperation with the Japan Electronic Industry
Development Association Committee 12 on Equipment
Communications.
It is the intent of this standard to be fully compatible with
SEMI E4 — Equipment Communications Standard (SECS-I). It is also
the intent to allow for compatibility with alternative message
transfer protocols. The details of the message transfer protocol
requirements are contained in § 6.
It is the intent of this standard to define messages to such a
level of detail that some consistent host software may be
constructed with only minimal knowledge of individual equipment.
The equipment, in turn, may be constructed with only minimal
knowledge of the host.
The messages defined in the standard support the most typical
activities required for IC manufacturing. The standard also
provides for the definition of equipment-specific messages to
support those activities not covered by the standard messages.
While certain activities can be handled by common software in the
host, it is expected that equipment-specific host software may be
required to support the full capabilities of the equipment.
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