SEMI C42 SPECIFICATION FOR SODIUM HYDROXIDE PELLETS
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SEMI C42 Document Information:
Title
SPECIFICATION FOR SODIUM HYDROXIDE PELLETS
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2005
Scope:
The scope of this document is all grades of sodium hydroxide
pellets used in the semiconductor industry.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
The purpose of this document is to standardize requirements for
sodium hydroxide pellets used in the semiconductor industry and
testing procedures to support those standards. Test methods have
been shown to give statistically valid results. This document also
provides guidelines for grades of sodium hydroxide pellets for
which a need has been identified. In the case of the guidelines,
the test methods may not have been statistically validated yet.
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