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SEMI E57 Document Information:
Title
MECHANICAL SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 mm WAFER CARRIERS
Semiconductor Equipment and Materials International
Publication Date:
Jun 1, 2000
Scope:
This standard is intended to set an appropriate level of
specification that places minimal limits on innovation while
ensuring modularity and inter-changeability at all mechanical
interfaces. Only the bottom half of the kinematic coupling is
specified so that suppliers can be flexible in designing wafer
carriers that can mate with it.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This standard specifies the mechanical couplings used to
ergonomically align and precisely support 300 mm wafer carriers
(including transport cassettes, process cassettes, quartz boats,
pods, lot boxes, and shipping boxes). Such a kinematic coupling can
be used at several interfaces, including:
• between a box or cassette and a tool load-port or vehicle
nest,
• between a transport cassette and a box, and
• between a process cassette or quartz boat and the floor of a
process chamber.
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