SEMI D10 TEST METHOD FOR CHEMICAL DURABILITY OF FLAT PANEL DISPLAY GLASS SUBSTRATES
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SEMI D10 Document Information:
Title
TEST METHOD FOR CHEMICAL DURABILITY OF FLAT PANEL DISPLAY GLASS SUBSTRATES
Semiconductor Equipment and Materials International
Publication Date:
Jan 1, 1995
Scope:
This standard may be used by vendors and/or buyers of glass
substrates for FPD.
This standard defines three methods for testing chemical
durability of various flat panel display substrates: (Method A)
Weight Loss, (Method B) Step Measurement Using Profilometry, and
(Method C) Surface Haze. Each method provides a measure of the
amount of material that is removed from a substrate during a
controlled chemical reaction sequence. This sequence is nominally
identical for each method.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This test procedure evaluates quantitatively the durability of
flat panel display (FPD) glass substrates using reagents employed
in FPD production processes.
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