SEMI F54 TEST METHOD FOR MEASURING THE COUNTING EFFICIENCY OF CONDENSATION NUCLEUS COUNTERS

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SEMI F54 Document Information:

Title
TEST METHOD FOR MEASURING THE COUNTING EFFICIENCY OF CONDENSATION NUCLEUS COUNTERS

Semiconductor Equipment and Materials International

Publication Date:
Oct 1, 2000

Scope:

This document provides the method for 1) generating an aerosol standard consisting of sodium chloride (NaCl) particles having sizes 0.01 micrometer and larger suspended in air at atmospheric pressure (1 × 10⁵ Pa), 2) controlling the size and concentration of particles in the aerosol, and 3) using the aerosol to determine the counting efficiency of a CNC as a function of particle size. This method is suitable for CNCs having a lower size sensitivity of 0.01 micrometer or larger.

NOTE 1: Suitable test methods for calibrating optical particle counters are contained in ASTM F328 and JIS B 9921.

This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Purpose

Particle specifications for gase s require the use of condensation nucleus counters (CNCs) having specified counting efficiencies. This document provides the test method for determining the counting efficiencies of CNCs.

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