SEMI C52 SPECIFICATION FOR THE SHELF LIFE OF A SPECIALTY GAS
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SEMI C52 Document Information:
Title
SPECIFICATION FOR THE SHELF LIFE OF A SPECIALTY GAS
Semiconductor Equipment and Materials International
Publication Date:
Mar 1, 2001
Scope:
This document applies to the s helf life of properly packaged,
filled and analyzed specialty gases as stored or supplied by a
specialty gas manufacturer or supplier. In this document, shelf
life is viewed from a quality point of view. The document does not
address safety aspects associated with the prolonged storage of
gases.
This standard does not purport to address safety issues, if any,
associated with its use. It is the responsibility of the users of
this standard to establish appropriate safety and health practices
and determine the applicability of regulatory limitations prior to
use.
Purpose
The purpose of this document is to define terminology and to
recommend minimum periods for the shelf lives of specialty gases.
It is meant to provide consistency in terminology among gas
suppliers and to provide a general guideline for users of these
gases.
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