SEMI F31 GUIDE FOR BULK CHEMICAL DISTRIBUTION SYSTEMS

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SEMI F31 Document Information:

Title
GUIDE FOR BULK CHEMICAL DISTRIBUTION SYSTEMS

Semiconductor Equipment and Materials International

Publication Date:
Jun 1, 1998

Scope:

This guide applies to BCD Systems used in semiconductor manufacturing facilities for supplying liquid chemicals to wafer cleaning and other manufacturing processes.

Purpose

This guide defines component s of Bulk Chemical Distribution Systems and sets forth Basic Design Elements and optional design features common to BCD Systems.

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