SEMI T10 TEST METHOD FOR THE ASSESSMENT OD 2D DATA MATRIX DIRECT MARK QUALITY

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SEMI T10 Document Information:

Title
TEST METHOD FOR THE ASSESSMENT OD 2D DATA MATRIX DIRECT MARK QUALITY

Semiconductor Equipment and Materials International

Publication Date:
Jul 1, 2001

Scope:

This standard defines assessment criteria, metrology methods, and assessment reporting procedures as applied to 2D Data Matrix code direct marks on semiconductor related materials. Application specifications, which refer to this standard, may further limit its scope to more specific requirements of a particular application.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

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