SEMI F53 TEST METHOD FOR EVALUATING THE ELECTROMAGNETIC SUSCEPTIBILITY OF THERMAL MASS FLOW CONTROLLERS
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SEMI F53 Document Information:
Title
TEST METHOD FOR EVALUATING THE ELECTROMAGNETIC SUSCEPTIBILITY OF THERMAL MASS FLOW CONTROLLERS
Semiconductor Equipment and Materials International
Publication Date:
Jun 1, 2000
Scope:
This document contains the requirements and test method that can
be used to evaluate whether a thermal mass flow controller will
maintain its functional characteristics when subjected to EMI
levels typical of the industry. The test method covers both the
radiated susceptibility (RS) and conducted susceptibility (CS) of
the controller when exposed to EMI. The electromagnetic
susceptibility requirements are extracted from MIL-STD-461C and
SAMA PMC-33.1, and the test method is a composite of the RS03,
CS01, CS02, and CS06 test methods defined in MIL-STD 462.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
The purpose of this document is to define a structured method
for testing and evaluating the electromagnetic susceptibility of
thermal mass flow controllers.
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