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Document SEMI E30.1 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.
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SEMI E30.1 Document Information:
Title
INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM)
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2006
Scope:
The scope of this standard is limited to the definition of
Inspection, Review, and Inspection/Review equipment behavior as
perceived by a SEMI Equipment Communications Standard II (SEMI
E5/SECS-II) host that complies with SEMI E30. It defines the
external view of the equipment through the SECS link; it does not
define the internal operation of the equipment. This standard
expands the SEMI E30 requirements and capabilities in the areas of
the processing state model, remote commands, variable items,
alarms, and data collection.
This standard is intended for ISEM equipment that generates data
and information about anomalies and defects found on substrates.
Inspection equipment finds anomalies. Anomalies are occurrences on
a substrate that have been judged to be unexpected, abnormal,
incongruous, or inconsistent. Anomalies may be examined using
review equipment, at which time they may be classified as defects
or non-defects. Some inspection equipment may generate, and some
review equipment may use, coordinate data to locate anomalies on a
substrate. The accuracy of the coordinate data generated or used is
equipment-dependent.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This standard establishes a Specific Equipment Model (SEM) for
Inspection and Review Equipment (ISEM). The model consists of
equipment characteristics and behavior that are to be implemented
in addition to the SEMI E30 fundamental requirements and additional
capabilities. The intent of this standard is to facilitate the
integration of ISEM equipment into an automated (semiconductor
fabrication) factory. This document accomplishes this by defining
an operational model for ISEM equipment as viewed by a factory
automation controller. This definition provides a standard host
interface and equipment operational behavior (e.g., control, state
models, data reports, and reporting levels). Several topics require
additional activity that are within the scope of this standard:
substrate pattern maps; defect classification code management; and
review data management.
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