SEMI E30 GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM)
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SEMI E30 Document Information:
Title
GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM)
Semiconductor Equipment and Materials International
Publication Date:
Jan 1, 1992
Scope:
The scope of the GEM standard is limited to defining the
behavior of semiconductor equipment as viewed through a
communications link. The SEMI E5 (SECS-II) standard provides the
definition of messages and related data items exchanged between
host and equipment. The GEM standard defines which SECS-II messages
should be used, in what situations, and what the resulting activity
should be. Figure 1 illustrates the relationship of GEM, SECS-II
and other communications alternatives.
The GEM standard does NOT attempt to define the behavior of the
host computer in the communications link. The host computer may
initiate any GEM message scenario at any time and the equipment
shall respond as described in the GEM standard. When a GEM message
scenario is initiated by either the host or equipment, the
equipment shall behave in the manner described in the GEM standard
when the host uses the appropriate GEM messages.
The capabilities described in this standard are specifically
designed to be independent of lower-level communications protocols
and connection schemes (e.g., SECS-I, SMS, point-to-point,
connection-oriented or connectionless). Use of those types of
standards is not required or precluded by this standard.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
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