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Document SEMI M12 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.
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SEMI M12 Document Information:
Title
SPECIFICATION FOR SERIAL ALPHANUMERIC MARKING OF THE FRONT SURFACE OF WAFERS
Semiconductor Equipment and Materials International
Publication Date:
Jul 1, 2006
Scope:
This specification defines the geometric and spatial limits of
the alphanumeric code, specifically for serial identification of
flatted and notched silicon wafers.
This specification does NOT address the marking techniques that
may be employed when complying with this standard.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This specification provides a serial alphanumeric marking of
silicon or other semiconductor wafers. The wafer serial number
links the properties of the wafer stored in an appropriate database
system to each individual wafer for purposes of tracking and
control during wafer and device manufacture.
By defining the basic code used for the mark, this specification
ensures the consistency of wafer marking performed by wafer
manufacturers. Thus, it allows simplification of the performance
requirements of automatic optical character reading (OCR)
equipment, provides for unassisted and immediate human readability
without wafer handling, and facilitates resolution of wafer level
process variations.
The marking code is intended to be valid for a broad range of
wafer products (i.e., epi, SOI, processed polished wafers,
etc.).
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