SEMI S9 GUIDE TO ELECTRICAL DESIGN VERIFICATION TESTS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT THAT HAVE BEEN MOVED TO SEMI S22

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SEMI S9 Document Information:

Title
GUIDE TO ELECTRICAL DESIGN VERIFICATION TESTS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT THAT HAVE BEEN MOVED TO SEMI S22

Semiconductor Equipment and Materials International

Publication Date:
Mar 1, 2007

Scope:

The scope of this document is all of the electrical design verification tests that were previously included in SEMI S9 (1101 revision) and incorporated into the SEMI S22 document.

The following tests have been transferred to the SEMI S22 document (section references are to SEMI S22):

• Leakage Current Test for Cord and Plug Equipment (§ 22.2)

• Earthing Continuity and Continuity of the Protective Bonding Circuit Test (§ 22.3)

• Starting Current Test (§ 22.4)

• Input Test (§ 22.5)

• Dielectric Test (§ 22.6)

• Strain Relief Test (§ 22.7)

• Transformer Output Short Circuit Test (§ 22.8)

• Power Supply Output Short Circuit Test (§ 22.9)

• Safety Circuit Function Test (§ 22.10)

• Safety Circuits Conductor Disconnection Test (§ 22.11)

• Capacitor Stored Energy Discharge Test (§ 22.12)

• Temperature Test (§ 22.13)

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purpose of this document is to provide a permanent withdrawal notice for SEMI S9 indicating that all technical content has been incorporated within SEMI S22.

NOTE 1: In the event that SEMI changes their document withdrawal process so that withdrawn document notices do not automatically disappear after two years, this document may be formally withdrawn.

A second purpose is to provide a brief history of the electrical design verification tests that have been documented in SEMI standards and used in the industry.

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