SEMI C53 SPECIFICATIONS FOR DIMETHYL SULFOXIDE (DMSO) [GRADES 1 AND 2]

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SEMI C53 Document Information:

Title
SPECIFICATIONS FOR DIMETHYL SULFOXIDE (DMSO) [GRADES 1 AND 2]

Semiconductor Equipment and Materials International

Publication Date:
Jul 1, 2004

Scope:

The scope of this document is all grades of DMSO used in the semiconductor industry.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purpose of this document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

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