SEMI F25 PARTICLE SPECIFICATION FOR GRADE 10/0.2 OXIDANT SPECIALTY GASES
 |
| Purchase Information |
| Use this form to request purchase information on SEMI online subscriptions. |
|
|
Document SEMI F25 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.
You may also purchase this document alone from the IHS Standards Store.
SEMI F25 Document Information:
Title
PARTICLE SPECIFICATION FOR GRADE 10/0.2 OXIDANT SPECIALTY GASES
Semiconductor Equipment and Materials International
Publication Date:
Jun 1, 1997
Scope:
This document applies only to oxidant gases delivered through
specialty gas systems at pressures up to 8 × 105 Pa (8
atmospheres). This method is not suitable for direct sampling from
high pressure cylinders at pressures above 8 × 105 Pa (8
atmospheres).
This standard does not purport to address safety issues, if any,
associated with its use. It is the responsibility of the users of
this standard to establish appropriate safety and health practices
and determine the applicability of regulatory or other limitations
prior to use.
Purpose
The purpose of this document is to set a maximum permissible
particle concentration for 10/0.2 grade oxidant specialty gases and
to describe a reference method for its verification.
About IHS
IHS (NYSE: IHS) is a leading global provider of critical technical information, decision-support tools and related services in a number of industries including aerospace and defense, automotive, construction, electronics, and energy. IHS serves customers ranging from large governments and multinational corporations to smaller companies and technical professionals in more than 100 countries. IHS been in business for more than 45 years and employ more than 2,300 people around the world.
