SEMI F33 TEST METHOD FOR CALIBRATION OF ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETER (APIMS)
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SEMI F33 Document Information:
Title
TEST METHOD FOR CALIBRATION OF ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETER (APIMS)
Semiconductor Equipment and Materials International
Publication Date:
Jul 1, 2008
Scope:
This method applies to the analyte calibration of the APIMS for
a target impurity range of 100 ppt to as high as 200 ppb impurity
range. The actual calibration range should bracket the impurity
measurement range of interest, dependent upon the measurement to be
conducted. Anything else is outside the range of the
calibration.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This test method may provide guidelines for the calibration of
the APIMS for measurement of impurities in nitrogen, argon, helium
and hydrogen. APIMS is currently the technique of choice for
measurements of low level impurities in gas distribution systems
and components because it is essentially the only commercially
available method capable of ppt impurity analysis and it has a
superior response time. This method may provide guidelines for
application of other techniques with similar detection limits and
response time to APIMS which may not be commercially available at
this time.
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