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Document SEMI E116 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.
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SEMI E116 Document Information:
Title
SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING
Semiconductor Equipment and Materials International
Publication Date:
Jul 1, 2007
Scope:
The Scope of this standard is to define equipment behavior
states and the data required to track basic equipment performance
for production equipment. These requirements are intended to
facilitate equipment-level and module-level state tracking and to
communicate state information to the host for simple equipment
performance tracking, without requiring host or operator input.
Specifically, this document provides:
• An Equipment Performance Tracking (EPT) state model that
defines triggers for state changes.
• Specification of data variables required to communicate basic
equipment performance data to the host computer.
• Specification of event messages used to communicate basic
equipment performance data to the host computer.
• Requirements for EPT compliance.
This standard specifies the concepts, behavior, and message
services that enable the host computer to obtain the equipment data
required for equipment performance tracking in an automated and
consistent manner, without operator or host input. It does not
specify the report of SEMI E10 states from the equipment to a host
computer, as this information requires user input and is already
specified by SEMI E58.
This standard does not conflict with SEMI E58 nor does it
inhibit the equipment's ability to report out SEMI E10 states via
SEMI E58.
This standard is a building block towards SEMI E10 and SEMI E79
by providing accurate equipment information required for SEMI E10
and SEMI E79 metrics, without dependence on operator or host input,
eliminating inaccuracies due to incorrect or untimely input from
the user. EPT assists both SEMI E10 and SEMI E79 by providing a
modular approach to equipment performance tracking, allowing the
state of the equipment to be determined by the states of its major
modules. EPT assists SEMI E79 by providing task-level detail of the
equipment or module's current activity, allowing performance
metrics to be tracked at the task level.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This document provides specification for implementing basic
equipment performance tracking for production equipment. Provisions
in this document enable the host computer to track basic equipment
performance in an automated and consistent matter, without operator
or host input. This document provides specification for equipment
suppliers to:
• Track basic equipment states (no operator or host input
required).
• Track basic equipment states in a modular manner, for both
major modules and the overall equipment.
• Report basic equipment state changes to a host computer, at
both module and equipment level.
• Report equipment's time in state to a host computer, at both
module and equipment level.
• Report reasons to a host computer for why equipment is blocked
from performing its task, at both module and equipment level.
Equipment users require the ability to track equipment
performance without dependence on user input to eliminate
inaccuracies due to incorrect or untimely input from the user. The
ability to track equipment performance without user input is
essential in 300 mm wafer factories where operational scenarios
require minimal manual interaction. EPT defines concepts, behavior,
and message services that enable the host computer to obtain the
equipment data required for equipment performance tracking in an
automated and consistent matter without operator or host input.
EPT enables factory managers to identify the current states of
factory equipment, both at the equipment level and at the module
level (e.g., processing chambers), without dependence on user
input. EPT enables factory engineers to evaluate the time that
equipment and modules spent in different states and identify areas
for improvement. EPT enables factory engineers to obtain directly
from the equipment the reasons why the equipment or module is
prevented from performing. EPT provides industrial engineers the
equipment data which, when combined with external data from the
Manufacturing Execution System (MES), will enable accurate
calculation of SEMI E10 states and SEMI E79 metrics at the
equipment-level and the module-level. EPT enables automation
engineers to develop reusable host interfaces by using a
standardized collection event and data variables to collect
equipment state data.
About IHS
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