SEMI D21 TERMINOLOGY FOR FPD MASK PATTERN ACCURACY

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SEMI D21 Document Information:

Title
TERMINOLOGY FOR FPD MASK PATTERN ACCURACY

Semiconductor Equipment and Materials International

Publication Date:
Jul 1, 2006

Scope:

These terms apply to photomasks that are principally used in fabricating flat panel display.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

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