SEMI F11 TEST METHOD TO OBTAIN AN INDICATION OF THE THERMAL CHARACTERISTICS OF TUBE FITTING CONNECTIONS MADE OF FLUOROCARBON MATERIALS
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SEMI F11 Document Information:
Title
TEST METHOD TO OBTAIN AN INDICATION OF THE THERMAL CHARACTERISTICS OF TUBE FITTING CONNECTIONS MADE OF FLUOROCARBON MATERIALS
Semiconductor Equipment and Materials International
Publication Date:
Sep 1, 1998
Scope:
This method can be used to characterize tube fitting connections
on the basis of test data developed under the conditions described
herein, but the results are not intended to imply a performance
rating.
Tube defined in this method has a circular cross section and is
made of fluorocarbon materials.
Tube fittings defined in this method are made of fluorocarbon
materials for all parts in contact with the internal fluid.
Parts such as a nut or gripper are not limited to being made of
a fluorocarbon material.
Only the seal between the tube and tube fitting being evaluated
is within the scope of this document. All other, threaded seals are
beyond the scope of this document.
When using this method for making comparisons among various tube
fittings and/or manufacturers, the user must be specific in the
selection of the tube and tube fittings to be evaluated.
The International System of Units (SI) is used as the standard
unit of measure in this document. The U.S. Customary units are in
parentheses for reference purposes only and have been rounded to
the nearest whole value.
Purpose
This method provides a uniform procedure to determine the
thermal characteristics of tube fitting connections made of
fluorocarbon materials.
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