SEMI F101 TEST METHODS FOR DETERMINING PRESSURE REGULATOR PERFORMANCE IN GAS DISTRIBUTION SYSTEMS

	Purchase Information Use this form to request purchase information on SEMI online subscriptions. SEMI Collections First Name: Last Name: Email address:

Document SEMI F101 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.

You may also purchase this document alone from the IHS Standards Store.

SEMI F101 Document Information:

Title
TEST METHODS FOR DETERMINING PRESSURE REGULATOR PERFORMANCE IN GAS DISTRIBUTION SYSTEMS

Semiconductor Equipment and Materials International

Publication Date:
Nov 1, 2005

Scope:

This test method applies to pressure regulators. The test procedures that measure these characteristics are intended to be performed sequentially, in the order given below. This document specifies test methods, which will allow the regulator manufacturer or user to determine regulator performance for the following characteristics:

• Particle Count

• Leakage

• Creep/Lock up

• Supply Pressure Effect

• Resolution

• Pressure vs. Flow Curve, Hysteresis Curve, and Operating Hysteresis Value

• Repeatability

• Set pressure Stability

• Step Function Transient Response

• Resonance

• Flow Coefficient

• Excess Pressure

• Endurance

This test method provides a common basis for communication between manufacturers and users.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

The purpose of this document is to define a method for testing pressure regulators being considered for installation into gas systems. Application of this test method is expected to yield comparable data among regulators tested for qualification purposes.

This document establishes a test method for quantifying regulator performance characteristics.

About IHS
IHS (NYSE: IHS) is a leading global provider of critical technical information, decision-support tools and related services in a number of industries including aerospace and defense, automotive, construction, electronics, and energy. IHS serves customers ranging from large governments and multinational corporations to smaller companies and technical professionals in more than 100 countries. IHS been in business for more than 45 years and employ more than 2,300 people around the world.