SEMI P10 SPECIFICATION OF DATA STRUCTURES FOR PHOTOMASK ORDERS
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SEMI P10 Document Information:
Title
SPECIFICATION OF DATA STRUCTURES FOR PHOTOMASK ORDERS
Semiconductor Equipment and Materials International
Publication Date:
Jul 1, 2009
Scope:
This structure only defines the data format for the transmitted
file. No particular database or programming language is specified
by this standard, except that an authorized implementation in
Extensible Markup Language (XML) format will be posted on the SEMI
P10 Web site for those that choose to use it. The data file is to
be transmitted as a UTF-8 file. As such, it is compatible with the
SECS-II standard.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
These data structure specifications are intended to facilitate
the transmittal of mask order data between software systems to
allow:
• automated order placement by mask customers and to allow
the automatic processing of such orders by mask shops, and
• automated delivery of actual mask results and
qualification data by mask shops and to allow the automatic
processing of such data by mask customers.
By using these standardized structures, software written
independently for either mask customers or mask shops should be
able to communicate unambiguously with software written by other
parties.
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