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SEMI E102 Document Information:
Title
PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK MATERIAL TRANSPORT AND STORAGE COMPONENT
Semiconductor Equipment and Materials International
Publication Date:
Jun 1, 2000
Scope:
This specification provides the common interfaces required by
Manufacturing Execution Systems for runtime interactions between
the factory (as represented by other CIM Framework components) and
the Material Tracking and Storage Component. Some interfaces
supporting configuration and tracking of the material transport and
storage equipment are the responsibility of the Equipment Tracking
and Maintenance component of the CIM Framework. These interfaces
are complementary to the interfaces of Transport Machines and
Storage Machines presented in this specification.
The responsibilities of the Material Transport and Storage
Component include interfaces that
• Support scheduling of material transport and processing by
predicting time for material delivery to specific locations. NOTE:
The interfaces for delivery time prediction are deferred as one of
the deficiencies noted in this provisional specification
• Execute and monitor transport jobs to move material to
specific locations.
- Validate that the job can be done: the material is
available, the destination is reachable and has available storage
or loadport capacity, and there are sufficient material movement
resources (cars, storage space, etc.) to implement the job.
- Request operations from AMHS equipment controllers to enact
internal material movement and storage actions. Implementations of
the Material Transport and Storage Component will use lower level
standards such as IBSEM and StockerSEM for communication with
equipment that performs the physical movement and storage
actions.
- Collect and record data on transport job execution and
history.
- Capture, record, interpret, and respond to equipment events
and fault detection.
- Generate MES-level job status events and material location
change events.
• Record and report on material locations and material transport
histories for material in the system
• Interact with machine and port interfaces for material
hand-off handshake protocols.
Automated Material Handling Systems (AMHS's) are an important
part of any semiconductor factory and have, typically, been
implemented and integrated with a Manufacturing Execution System
(MES) as a separate logical software entity. An AMHS is made up of
the AMHS Framework, the system controllers for AMHS equipment (the
software) and the transport and storage machines (the hardware). In
keeping with this tradition, the CIM Framework views the AMHS as a
"black box" where the interface into that system is visible, but
the inner workings and control of that system is the responsibility
of the AMHS supplier and not in the domain of the MES. The CIM
Framework specifies the Material Transport and Storage Component
(MTSC) as the MES level interface to AMHS capabilities.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
Wafer fabrication factories will require the baseline
capabilities of stocker storage and interbay transport. In addition
to these baseline capabilities, intrabay transport will be added as
a result of ergonomic and safety requirements brought about by the
increased size and weight of 300 mm wafer carriers. These stocker,
interbay transport, and intrabay transport systems will be required
to be fully integrated with each other and the factory
Manufacturing Execution System (MES) in order to realize the full
vision of cost effective automated material transport to and from
production equipment.
A baseline requirement of Automated Material Handling System
(AMHS) equipment is efficient integration with the factory MES.
Therefore, the purpose of this specification is to enable cost
effective integration of interoperable AMHS systems, as illustrated
in Figure 1. Manufacturers require a SEMI standard which specifies
the visible behavior of the AMHS Integration system and its
interface to the factory MES. The purpose of this standard is to
specify these interfaces and the interactions between MES and AMHS
systems as a part of the CIM Framework. While the term AMHS is
commonly used to refer to a wide range of equipment and systems
that support automated material handling, the CIM Framework
specifies a software component called "Material Transport and
Storage Component (MTSC)" which represents the standard interface
of the MES to the complete suite of AMHS capabilities.
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