SEMI F90 SPECIFICATION FOR DIMENSION OF STANDARD SIZE TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.5 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
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SEMI F90 Document Information:
Title
SPECIFICATION FOR DIMENSION OF STANDARD SIZE TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.5 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
Semiconductor Equipment and Materials International
Publication Date:
Mar 1, 2004
Scope:
This document includes common requirements, layout, size,
detailed specifications, and dimensions of the components.
This standard applies to all standard size two port two fastener
components (except mass flow controllers and mass flow meters). The
components (i.e. valves, pressure regulators, pressure transducers,
filters and purifiers) are mounted on substrates with fasteners
accessible from the top.
This standard only applies to components, which control flow
of = 50 slm nitrogen equivalent at 308 kPa (44.7 psia). This
standard also only applies to components with operating pressures
less than 3445 kPa (500 psia) at 20ºC.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This standard establishes the properties and physical dimensions
of two port components for 1.5 inch type surface mount gas
distribution systems.
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