SEMI E106 OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 mm WAFERS
 |
| Purchase Information |
| Use this form to request purchase information on SEMI online subscriptions. |
|
|
Document SEMI E106 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.
You may also purchase this document alone from the IHS Standards Store.
SEMI E106 Document Information:
Title
OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 mm WAFERS
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2004
Scope:
This document describes how the SEMI standards for 300 mm
physical interfaces and carriers work together. This document also
clarifies the requirements (direct and indirect) on suppliers of
each product, and suggests how users see these standards and
options.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This document is intended to help users and suppliers of 300 mm
carriers and production equipment to understand the complex
interdependencies among the SEMI standards for 300 mm physical
interfaces and carriers and to determine which standards apply to
which products. As shown in Figure 1, these standards are highly
inter-related, have many complex dependencies, and inherit a
numbering system (from legacy 200 mm standards) that is
non-intuitive.
About IHS
IHS (NYSE: IHS) is a leading global provider of critical technical information, decision-support tools and related services in a number of industries including aerospace and defense, automotive, construction, electronics, and energy. IHS serves customers ranging from large governments and multinational corporations to smaller companies and technical professionals in more than 100 countries. IHS been in business for more than 45 years and employ more than 2,300 people around the world.
