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SEMI F72 Document Information:
Title
TEST METHOD FOR AUGER ELECTRON SPECTROSCOPY (AES) EVALUATION OF OXIDE LAYER OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS
Semiconductor Equipment and Materials International
Publication Date:
Mar 1, 2009
Scope:
This document describes a test method to characterize the
composition and thickness of the chromium-enriched oxide layer of
stainless steel surfaces and to detect surface contamination in
tubing, fittings, valves and other components. The procedure
involves detection and measurement of the surface elemental
composition by Auger Electron Spectroscopy (AES). This procedure
also describes the test method for a depth compositional profile of
Cr, Fe, Ni, O, and C from the as-received surface, through the
oxide layers, and extending into the base metal. This measurement
provides oxide thickness and chromium enrichment information
throughout the passivated region.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
The purpose of this document is to define a test method to
characterize the surface composition of passivated 316L stainless
steel components being considered for installation into a
high-purity gas distribution system. This test method is intended
to be applied to the wetted surfaces of stainless steel tubing,
fittings, valves, and other components as a measure of the
effectiveness of passivation.
This document defines a method of testing the wetted surfaces of
stainless steel tubing, fittings, valves, and other components to
determine the surface and near-surface composition as a measure of
the effectiveness of passivation processes.
The objective of this method is to describe a general set of
instrument parameters and conditions that will achieve reproducible
measurements within the chromium-enriched passive oxide layer.
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