SEMI D12 SPECIFICATION FOR EDGE CONDITION OF FLAT PANEL DISPLAY (FPD) SUBSTRATES

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SEMI D12 Document Information:

Title
SPECIFICATION FOR EDGE CONDITION OF FLAT PANEL DISPLAY (FPD) SUBSTRATES

Semiconductor Equipment and Materials International

Publication Date:
Jan 1, 1995

Scope:

Significance — The edges of a flat panel display substrate are important in both the specifications for and uses of the material. They effect the means for producing, handling, storing, and processing substrates. Defining the terminology and the geometric properties of these edges will assist both the producers and users of substrates and processing/inspection equipment.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

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