SEMI E20 CLUSTER TOOL MODULE INTERFACE: ELECTRICAL POWER AND EMERGENCY OFF STANDARD
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SEMI E20 Document Information:
Title
CLUSTER TOOL MODULE INTERFACE: ELECTRICAL POWER AND EMERGENCY OFF STANDARD
Semiconductor Equipment and Materials International
Publication Date:
Jun 1, 1997
Scope:
The standard deals with the delivery and emergency interruption
of electrical power to the modules of a cluster tool.
This standard does not purport to address safety issues, if any,
associated with its use. It is the responsibility of the users of
this standard to establish appropriate safety health practices and
determine the applicability or regulatory limitations prior to
use.
Purpose
The purpose of the standard is to specify the Emergency Off
capability to the modules of a cluster tool; to allow module
Emergency Off disconnect and reconnect in a safe manner without
removing power from the rest of the tool; and to prevent power from
being applied to a module when its Emergency Off is
non-functional.
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