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SEMI F58 Document Information:
Title
TEST METHOD FOR DETERMINATION OF MOISTURE DRY-DOWN CHARACTERISTICS OF SURFACE-MOUNTED AND CONVENTIONAL GAS DELIVERY SYSTEMS BY ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETRY (APIMS)
Semiconductor Equipment and Materials International
Publication Date:
Jul 1, 2008
Scope:
This test method applies to all types of surface mount and
conventional gas distribution systems used in semiconductor
processing.
Test Medium —
The test procedure will be carried out in nitrogen. Other
"inert" gases will have different purging characteristics and may
dry a system more quickly or slowly. Reactive gases may react
chemically with moisture. Considerations relating to corrosion
resistance are outside the scope of the present document, although
the test procedure may prove useful in corrosion studies. The
results will provide a ranking with respect to moisture
contribution arising as a result of differences in design, which
may be applied with due caution to systems intended for use in
other gas applications.
Operating Situations —
Moisture contribution from a gas delivery system may be the
result of contamination arising in its manufacture, or from
subsequent exposure to ambient air or non-dry gas. Thus, it is
necessary to consider two main situations:
The "initial dry-down" situation, which is determined by the
moisture content of the components in the system (as received) with
the effects of manufacturing process and design, surface quality,
pre-treatment and packaging convoluted together.
The "response to upset" situation, which is determined by the
amount of moisture taken up by the system and subsequently released
in any exposure after receipt.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This document describes the procedure for determination of the
moisture dry-down characteristics (quantity of removable moisture)
of surface mount and conventional gas distribution systems
(integrated gas distribution systems). APIMS is currently the
method of choice for such dynamic tests because it is the
commercially available technique capable of ppt moisture analysis
with the fastest response time. This test method may provide
guidelines for the application of other techniques with similar
detection limits and response time to APIMS which may not be
commercially available at this time.
The results of this test can be used for qualitative ranking of
gas delivery system based on the design. It can also be used by a
sufficiently sophisticated user as input for numerical simulation
of a gas distribution system behavior.
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