SEMI E73 SPECIFICATION FOR VACUUM PUMP INTERFACES - DRY PUMPS
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SEMI E73 Document Information:
Title
SPECIFICATION FOR VACUUM PUMP INTERFACES - DRY PUMPS
Semiconductor Equipment and Materials International
Publication Date:
Mar 1, 2001
Scope:
This standard applies to vacuum pumps supplied with 300 mm
semiconductor processing equipment.
The standard specifies the mechanical and electrical interfaces
for dry pumps including the following.
• Mechanical connectors
• Control signals and connector
• Power supply and connector
Figure 1 shows the scope of the standardized interface.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
This standard specifies the physical and electrical interfaces
for dry pump (DRP) type vacuum pumps. Standardization of pump
interfaces will allow for interchangeability of pumps. Device
manufacturers use this standard when procuring processing equipment
to specify to the equipment supplier the interface required for
interchangeability of pumps. This document is also used by
semiconductor processing equipment suppliers to specify
standardized interfaces to pump suppliers.
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