SEMI D49 SPECIFICATION OF SINGLE SUBSTRATE ORIENTATION FOR LOADING/UNLOADING INTO/FROM EQUIPMENT TO SPECIFY ID READER POSITION

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SEMI D49 Document Information:

Title
SPECIFICATION OF SINGLE SUBSTRATE ORIENTATION FOR LOADING/UNLOADING INTO/FROM EQUIPMENT TO SPECIFY ID READER POSITION

Semiconductor Equipment and Materials International

Publication Date:
Jul 1, 2007

Scope:

For this purpose, this standard specifies only the orientation of single substrate in loading/unloading into/from AMHS and equipment and does not specifies the orientation of single substrate inside the equipment.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

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