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Document SEMI MF2074 is offered by IHS as part of an online subscription. This subscription contains many documents on the same topic.
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SEMI MF2074 Document Information:
Title
GUIDE FOR MEASURING DIAMETER OF SILICON AND OTHER SEMICONDUCTOR WAFERS
Semiconductor Equipment and Materials International
Publication Date:
Jul 1, 2007
Scope:
This guide defines standardized positions for measuring diameter
of circular wafers of silicon and other semiconducting materials
that contain flats or notches (fiducials) on the periphery. It was
developed for use with silicon wafers with standard diameter and
fiducial positions as given in SEMI M1.
It may be applied to other semiconductor wafers if the flat
locations are properly taken into account.
No recommendations are given regarding the test instrumentation
to be used, but either contacting (taking suitable precautions to
avoid edge chipping) or non-contacting gauges have been found to be
satisfactory. Wafers of any size can be measured provided that
suitable test jigs and instruments are available.
Roundness of wafers cannot be determined from measurements made
solely at the positions defined in this guide. No information is
provided concerning the diameter of the wafer at points other than
those measured.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the user of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
The diameter of semiconductor wafers is an important parameter
in microelectronic fabrication. Wafer diameters must conform to the
limits specified in SEMI M1; or other agreed upon limits, or
product that is otherwise suitable may not fit correctly in process
equipment.
Cam-follower edge rounding usually results in wafers that are
circular. However, wafers ground with edgefollower edge rounding
equipment may be elliptically shaped. Measurements made at the
three positions specified in this guide do not provide complete
information about the roundness of the wafer.
Keywords:
- diameter
- semiconductor
- silicon
- wafer
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