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SEMI D31 Document Information:
Title
DEFINITION OF MEASUREMENT INDEX (SEMU) FOR LUMINANCE MURA IN FPD IMAGE QUALITY INSPECTION
Semiconductor Equipment and Materials International
Publication Date:
Nov 1, 2002
Scope:
This standard is applicable to FPD (Flat Panel Displays)
excluding CRT and HMD (Head Mount Displays). The display sizes
targeted are typically from Type 8 (8" (20.3 cm) diagonal) to Type
30 (30" (76.2 cm) diagonal).
This standard does not purport to address safety issues, if any,
associated with its use. It is the responsibility of the users of
this standard to establish appropriate safety health practices and
determine the applicability or regulatory limitations prior to
use.
Purpose
This standard will define the index of measurement for mura in
FPD image quality inspection.
Conventionally, inspection of FPD image quality has been
sensory, mainly conducted via the human eye, and among the items
detected, there has been no common standard for mura and other
associated defects. For this reason, when panel makers and their
users who conduct business with a fixed quality level set a mura
acceptance level, limit samples are used as necessary.
Operational problems with limit samples include:
• Level of mura cannot be determined without viewing the sample.
Due to this, it is not possible to express the level via written
documentation or telephone.
• The sample settings are subjectively decided by the setter,
and lack objectivity.
• It is difficult to setup and maintain a consistent sample
level at multiple locations.
Etc. — Above all, in a market complicated by multiple
panel makers and multiple users, where presently there is no fixed
standard for expressing mura level, we have to say that it is
extremely difficult to ensure a fixed level for panel quality.
In this standard, using ergonomics approach, we will investigate
the human eye's sensitivity regarding mura, and by expressing the
relation between mura area and contrast, propose an index to
express the level of mura.
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