SEMI P11 TEST METHOD FOR DETERMINATION OF TOTAL NORMALITY FOR ALKALINE DEVELOPER SOLUTIONS
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SEMI P11 Document Information:
Title
TEST METHOD FOR DETERMINATION OF TOTAL NORMALITY FOR ALKALINE DEVELOPER SOLUTIONS
Semiconductor Equipment and Materials International
Publication Date:
Mar 1, 2008
Scope:
An acid-base potentiometric titration to single or multiple
inflection points is performed on an automatic recording titrator
using standardized hydrochloric acid as the titrant. The normality
(meq/mL) is then calculated by the titrator using the data
obtained.
NOTICE: This standard does not purport to
address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
Purpose
The purpose of this document is to provide a test method for
determination of total normality for alkaline developer
solutions.
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